Chemical contaminant removal filter "Risoguard LPS Filter"
Chemical filters that protect lenses from various pollutants and further extend their lifespan.
The "RisoGuard LPS Filter" is a cabinet-type chemical filter that enhances the removal performance of the current class-leading "RisoGuard BSMmax Filter" and achieves further longevity. It protects wafers and lenses from contamination by various pollutants, maximizing their lifespan. It is ideal for removing contaminants from the air supplied to semiconductor manufacturing equipment as well as to facilities and areas that require ultra-clean environments. 【Features】 ■ Usable for the removal of various pollutants: - Acidic gases (SO2, HCl, HBr) - Basic gases (NH3, NMP, amines) - Condensable organic gases (HMDSO, TMS) ■ Achieves increased adsorption capacity while maintaining the same size as the RisoGuard BSMmax Filter ■ Can be replaced with the RisoGuard BSMmax Filter ■ Filter reuse is possible through the Refill Program ■ Global sales and service system For more details, please contact us or download the catalog.
- Company：日本ドナルドソン
- Price：Other
